News & Media

Ebara celebrates the 30th anniversary of its precision machinery business

March 31, 2016

Fiscal 2015 marks the 30th anniversary of the precision machinery business of Ebara Corporation (hereinafter “Ebara”). We are now steadily moving forward into the next three decades. Our precision machinery business was established in 1985 as one of the divisions at the head office. Since that time, it has quickly and unfailingly offered what customers are looking for in the semiconductor market and other related markets.

The transistor was invented in 1947. In the more than 60 years that have passed since then, semiconductor technologies have continued developing on the basis of the IBM/Dennard law of miniaturization*1 and in accordance with Intel/Moore’s law*2. The semiconductor-related markets still occupy the top position in high-tech industries and will keep expanding. Our precision machinery business will also continue to grow with our customers as we work to celebrate our success again 30 years from now.

[History of the Precision Machinery Business]

  • 1985: Development of dry vacuum pumps and turbo molecule pumps starts
  • 1986: The first dry vacuum pump (roots-type Model ERD/UERR) is shipped
  • 1992: The first CMP (chemical mechanical polishing) system is shipped
  • 1995: Model AA, a roots-type dry vacuum pump, is launched (first energy-saving product of the kind)
  • 2001: Model UFP300, a plating system for 300-millimeter wafers, is shipped
  • 2004: Model EAC200bi/300bi, a bevel polishing unit, is launched
  • 2008: Model G5, a combustive exhaust-gas treatment system, is launched (combustive, third-generation)
  • 2012: Model F-REX300S2 (third-generation F-REX), a CMP system for 300-millimeter wafers, is launched
  • 2015: Model UFP300A, a new plating system, is launched
※1 A law on speeding up integrated circuits proposed by Robert Dennard of IBM
※2 A law on the degree of integration of a semiconductor chip proposed by Gordon Moore of Intel
Notes) The alphabet letters and combinations of alphabet letters and numerical figures listed with the word “Model” in the descriptions in the chart above signify the code our company uses to indicate the corresponding model.