News & Media

EBARA completed the expansion of Kumamoto plant

December 5, 2016

EBARA CORPORATION (“EBARA”) completed the construction of a new manufacturing plant and its related service facilities in Kumamoto Prefecture, with operations commencing on November 15, 2016.
The new plant established in Kumamoto is similar in size to the other manufacturing plants currently in operation. It features highly flexible production facilities capable of making CMP systems, a major product line for EBARA, as well as other products, including semiconductor manufacturing equipment. EBARA will remain focused on energy-saving initiatives aimed at halving the clean room’s power consumption and recycling more than 95% of the water used in the production process, in pursuit of a lower environmental burden, environmental harmony, and synergy with local communities.

The new plant is expected to double EBARA’s production capacity for precision products in Kumamoto, facilitating quick and flexible responses to customer demands and requirements regarding delivery periods, as well as flexible production management at manufacturing facilities, including those for precision products located in Fujisawa. The new plant will start running at full production capacity at the beginning of next year. We remain committed to meeting the strong demand for CMP systems.

The maintenance service facility in Kumamoto features a strong overhauling capacity, three times that of similar facilities operating in Kyushu. Kumamoto’s service facility will serve as a hub for maintenance services for dry vacuum pumps, mainly covering the Kyushu and Chugoku areas.

We expect that the semiconductor market will show consistent growth in the coming years, given rising demand from customers in the auto, energy, and medical industries, as well as the growing popularity of the Internet of Things (IoT), the idea of connecting devices over the Internet. In the semiconductor manufacturing equipment business, we must accommodate diverse business requirements related to the use of applications and manufacturing processes on the part of our customers. EBARA committed to providing high-performance semiconductor manufacturing equipment that meets customer requirements while taking steps to enhance maintenance and support services, seeking to provide flexible responses to customer requirements and expanding the business amid the fast-changing semiconductor market.

New Kumamoto Plant
Service Facility
【New Kumamoto Plant】
(1)  Kumamoto District Office
     Location: 4000-1 Koei, Nankan-machi, Tamana-gun, Kumamoto
     Site area: Approximately 140,000m2
(2) New Kumamoto Plant
      Operating functions:Production of semiconductor manufacturing equipment. Maintenance and support services related to dry vacuum pumps
     Building area: Approximately 12,000m2
     Launch date: November 15, 2016
     Investment: Approximately ¥6.8 billion