The event was held online
EBARA CORPORATION (EBARA) held an on-line symposium on smart CMPs, titled "The 6th Ebara Open Innovation Symposium on CMP: Approaches to Smart CMP" on June 16, inviting prominent professionals from home and abroad.
1.Background
EBARA conducts EHU*1 activities to foster human resources and support technological development. As a part of the project, EBRA has been holding EOI*2 symposiums since 2018 for "a place to promote industry-academia collaboration and co-creation across technological fields." Recent advances in AI and IoT technologies have made it possible to control semiconductor manufacturing equipment and optimize processes in real time. In addition, while Edge AI*3-based learning and self-monitoring capabilities are also advancing, the intelligent semiconductor manufacturing equipment is becoming essential and a source of competitiveness.
The purpose of this symposium is to encourage technological development and to accelerate the enhancement of CMP competitiveness by sharing our initiatives on simulations, cyber physical systems, AI and xR and discussing the possibilities and challenges of intelligent CMPs.
2.Overview
This symposium was attended by five professors: Prof. Jing-Ming Guo (National Taiwan University of Science & Technology), Prof. Haedo Jeong (Pusan National University), Prof. Akira Fukuda (National Institute of Technology, Tokuyama College), and Asst. Prof. Yohei Hasimoto (Kanazawa University), Prof. Norikazu Suzuki (Chuo University) and more than 150 EBARA employees. Professors and EBARA researchers gave presentations on the use of AI and xR for CMP and simulation in three sessions. In the subsequent roundtable discussions, active discussions took place on the approach to intelligent CMPs.
3.Future Plan
EBARA's Long-Term Vision, E-Vision 2030, raises "contribution to the creation of an affluent and evolving lifestyle" as one of materiality. We will continue to hold EHU lectures and seminars inviting researchers in and out of Japan including professors who are involved in joint researches such as EOI, to strengthen our product competitiveness and technological capabilities leading to creation of new businesses.
The EBARA Group aims to contribute to the achievement of the Sustainable Development Goals (SDGs) by addressing material issues identified in its long-term vision and executing the medium-term management plan to increase corporate value.
*1. EHU (Ebara Hi-tech University)
Initiative to study cutting-edge knowledge and technologies to enhance the technological skills of researchers/engineers and promote the creation of new research ideas.
*2. EOI (Ebara Open Innovation)
Unique form of open innovation to educate young researchers at external research institutions while conducting joint researches on advanced technology issues.
*3. Edge AI
Technologies to install AI near terminals for learning and inference
[Past Events]
・The 5th Ebara Open Innovation Symposium on Computational Science & Optimization for Advanced Products & Processes
・The 4th EBARA Open Innovation Symposium on Post CMP Cleaning Technology