2022.07.07
Dry Vacuum Pump the Model EV-X
In July 2022, EBARA CORPORATION (EBARA) Precision Machinery Company achieved 200,000 units in the number of Dry Vacuum Pumps shipped since the 36th year of its launch.
Our Dry Vacuum Pump is a non-contact type vacuum pump that does not use any oils or liquids to encapsulate. It is possible to create a constant high vacuum and clean environment that is indispensable for the semiconductor manufacturing process by applying EBARA's proprietarily superior rotary machinery technology. Long maintenance cycles can be achieved because there are few deteriorated parts with a non-contact type seal structure.
In 2021, we unveiled a Dry Vacuum Pump the Model EV-X for medium duty processes in the manufacturing process of semiconductors. Compared to our existing model, the product consumes 25% to 50% less power. At the same time, it improves process gas exhaust performance. HARC (deep hole) process required for 3D NAND of state-of-the-art memory devices*1, etching process for inter layer dielectrics, the ashing process*2 that requires high-flow gassing, as well as the epitaxial process *3.
The Dry Vacuum Pump Series, with our innovative technology, offers vacuum solutions not only for cutting-edge semiconductor manufacturing processes, but also for a wide range of industries, including analyzers, dries, LEDs, and lithium-ion batteries. In addition, we will pursue energy conservation and miniaturization in all our products, contributing to carbon neutral while reducing utility costs for our customers.
In 2020, we completed building V7, an automation plant in Fujisawa that produces Dry Vacuum Pumps. At the new plant, we will introduce automation and other state-of-the-art technologies, conduct one-stop production from machining to assembly and shipment testing, and continue to work to further improve productivity. We would like to express our gratitude to the many customers who have patronized us and to the business partners who have supported us in achieving the cumulative delivery of 200,000 units of Dry Vacuum Pumps. We will continue to sincerely address customer issues and requests, and provide products and service and support that conform to cutting-edge semiconductors technology.
The EBARA Group aims to contribute to the achievement of the Sustainable Development Goals (SDGs) by addressing material issues identified in its long-term vision and executing the medium-term management plan to increase corporate value.
High Aspect Ratio Contact. The ratio of hole diameter to depth (Aspect Ratio: AR ratio) to be processed by etching technique. A very large AR ratio is called HARC. With the refinement of semiconductor equipment, high-precision etching is required.
Process to remove unwanted resist after etching.
One of the thin film crystal growth technologies for semiconductor manufacturing. To grow a thin film of a new single crystal on a substrate of a single crystal of a semiconductor.