2024.12.09
Model LPCMN
EBARA CORPORATION will launch the Model LPCMN combustion-based exhaust gas abatement system, engineered to safely neutralize process gases in semiconductor manufacturing. Sales are set to begin in January 2025.
<h3><b>1．Background</b></h3>
The semiconductor manufacturing industry increasingly employs a variety of specialized gases, making it essential not only to abate them safely but also to minimize reactive byproducts that can hinder continuous operation. By addressing these needs, EBARA has developed the new Model LPCMN, which enhances processing and durability performance over its predecessor, Model TND.
<h3><b>2． Key Features</b></h3>
The Model LPCMN incorporates the following four key features：
① Reduction of Byproduct Adhesion and NOx/COx Emissions
Achieving a high Destruction and Removal Efficiency (DRE) of over 95% for hard-to-decompose gases like CF4, Model LPCMN utilizes a newly developed dual-stage combustion burner. This innovation reduces byproduct adhesion within the gas processing chamber while also lowering NOx/COx emissions.
②Compact Design for Space Efficiency
The unit’s height has been reduced by approximately 50% compared to previous models, allowing for more effective use of upper space in facilities.
③Hydrogen Fuel Option
In addition to conventional fossil fuel, the Model LPCMN lineup now includes a hydrogen fuel option for customers seeking more sustainable energy choices.
④Maximum Airflow Capacity of 600L/min
Despite its compact form, the Model LPCMN maintains the same high airflow capacity of 600L/min as the Model TND, ensuring optimal performance.
<h3><b>3．Specifications</b></h3>
| Model code | LPCMN |
| Maximum Inlet Connections | 4 (6-inlet model to be released in 2025) |
| Maximum Gas Inflow | 600L/min (future high-capacity versions also planned) |
| Dimensions (W x D x H, mm) | 1200 x 700 x 990 |
| Fuel Options | Hydrogen, city gas, propane |
| Compatible Processes | ALD, PE-CVD, LP-CVD, Etching |
<h3><b>4．Future Plans</b></h3>
The Model LPCMN will be showcased, including a mockup and panel display, at SEMICON Japan 2024, held at Tokyo Big Sight starting December 11, 2024. EBARA remains dedicated to addressing industry challenges with advanced technology, contributing to the further growth of the semiconductor sector, and supporting our long-term vision, "E-Vision2030," which aims to enhance quality of life through innovation.
The EBARA Group aims to contribute to the achievement of the Sustainable Development Goals (SDGs) by addressing material issues identified in its long-term vision and executing the medium-term management plan to increase corporate value.
※ ”Model ○○○” in this release is our model code
For business inquiries: pmc_info@ebara.com
Request for Interview: ec-pr@ebara.com