Ebara Engineering Review

by Yusuke TAMARI, Hiroshi HASHIMOTO, Kenichi SEMITANI, & Nobuhiko HAMANO I
Development is underway for pyrolysis gasification by an ICFG (Internally Circulating Fluidized-bed Gasifier). This next-generation technique has been tested, using a pilot plant at EBARAOs Sodegaura Plant, for more than 2000 hours since 2003. The following discusses basic concepts and results of gasification using wood-based biomass as feedstock. It had been confirmed that relatively high calorific product gas (mainly hydro-carbon) can be produced and that stable rated operation is possible by feeding this product gas to a gas engine or a micro gas turbine.

Keywords
Gasification, Fluidized-bed, Biomass, ICFG, Gas engine, Micro gas turbine, Power generation

by Satoshi YANO, Norio YAMADA, & Takayoshi ADACHI
A siloxane removal process which efficiently and continuously removes siloxanes by a small-scale adsorbent column has been developed. A performance test carried out continuously for over 3000 hours proved its effectiveness. By this process there is no need to exchange the adsorbent and the column is maintenance-free. The process features the TSA (Thermal Swing Adsorption) technique which enables considerable space-saving. Thus, unfavorable effects by siloxanes on generators using biogas at wastewater treatment plants can be prevented.

Keywords
Sewage treatment plant, Digester, Digester biogas, Siloxanes, Silicon oil, Silicon dioxide, Vapor pressure, Hydrocarbon, Resin adsorbent, Thermal swing adsorption

by Takashi KAWANISHI, & Noboru MAKITA
EBARA's 1 kW home-use fuel cell co-generation system, which uses polymer electrolyte fuel cells, has started being used by Tokyo Gas Co., Ltd. since February 2005. This system features energy-saving and minimized CO₂ emission. Development is underway to enable widespread home-use of this system.

Keywords
Fuel cell, Co-generation system, Polymer electrolyte fuel cell, Global warming

by Junya KAWABATA, & Yasutaka KONISHI
A horizontal multi-stage pump capable of handling relatively small amounts of water but with a high head, the Model EHM, has been developed to be used in combination with die temperature regulators, pure water production systems, and cleaning systems. The pump is lightweight, compact, and features low noise and high reliability. Either FC/SUS304 or SCS/SUS316 can be selected as the material for the wetted section of the pump, depending on the quality of the handled liquid. The following outlines this pump which is about to be released into the market and introduces its features.

Keywords
Horizontal multi-stage pump, Stainless sheet metal stamped, Stage casing, Impeller, Axial thrust, Spline shaft, Press fitting

by Takahide KOMATSU, & Kazuhiro KANEDA
The Model F3100 Packaged Booster System has undergone a model change. In the modified system, the detection of water levels in the water reception tanks is facilitated and diagnosis of minor failure is enabled as well. As for water quality, the system satisfies regulations set by the Japanese waterworks law. The system is fully capable of providing safe potable water.

Keywords
Packaged booster system, Inverter, Estimated constant end pressure control, Operating history, High temperature specification, Detection of irregularity in pump starting frequency, Detection of irreguarity in pressure tank, Detection of irreguarity in flow switch, Detection of irreguarity in pressure sensor

by Kazuhiko SUGIYAMA, Kenji ICHIHARA, & Tsuyoshi TOMITA
In February 2003 a partnership contract was signed between Pfleiderer Wind Energy (a German manufacturer of wind turbines; currently Fuhrlaender Pfleiderer) and EBARA CORPORATION to launch off EBARA Pfleiderer Company Limited, a company involved in the manufacture, sales and after sale service of wind turbine power generation systems in Asia, including the sole rights in Japan for the same. The company started off commercial business in April the same year with a target of providing 700 MW of power in Japan and Asia in the next ten years. In November of 2004 the first wind turbine system (output power 1500 kW) was shipped to Sakata City, Yamagata Prefecture. The order had been placed by Cosmo Oil. The following outlines this power turbine system and introduces its superior features.

Keywords
Wind turbine, Generator, Double-fed induction generator, Pitch control system, Inverter, Speed control, Power control, Power facter control, Remote control, Sakata

by Toshihiro OHTANI
Micro-structural evolution of 2.25 Cr-1Mo steels, subjected to tensile creep damage at 923 K, was studied by monitoring shear-wave attenuation and velocity using electromagnetic acoustic resonance (EMAR). This was based on an observation that monitoring of micro-structural changes in the bulk of high sensitivity metals can be done by following non-contact transduction based on magneto-strictive mechanism. The study revealed an attenuation peak, independent of applied stress, at short intervals, 50% to 60% of creep life. This novel phenomenon was interpreted as a drastic change in dislocation mobility and rearrangement, an observation supported by a TEM study on dislocation structure. A dense dislocation structure started to transform into sub-grain boundaries during the occurrence of this phenomenon, temporally accompanying long, free dislocation and absorbing a great amount of ultrasonic energy in producing an attenuation peak. Study results suggested that the use EMAR carried the potential to assess the progress of creep damage and to predict remaining creep life of metals.

Keywords
Creep damage, Electromagnetic Acoustic Resonance (EMAR), Dislocation damping, Ultrasonic attenuation, Noncontact evaluation, 2.25 Cr-1Mo steel

by Chikara MAKINO, Masahito KAWAI, & Ryota MIKI
A new packaged auxiliary booster system for home-use has been developed. This system, a product certified by the Japan Waterworks Association, is designed to backup the supply of tap water by a booster pump to tap water outlets on the second and third floors of homes. Its pump unit features a variable-speed pump for shallow wells, previously released into the market. Estimated constant end-pressure control by an inverter realizes energy conservation and noise reduction. The booster pump does not turn on when the water supply pressure in the supply line is maintained above the rated value. In such case the water becomes supplied under normal pressure in the water main, via a bypass line between the suction and discharge side of the booster pump.

Keywords
Packaged auxiliary booster system, Bypass, Reverse flow, Protection function, Low suction pressure, Chattering, Excessive frequency of starting

by Jun AOYAMA
The RFW Series Absorption Chiller is a steam-driven, double-effect absorption chiller developed in line with the market demand for high efficiency chillers. The RFW Series features the world's highest level steam consumption rate of 3.5 kg/h·USRt) under rated operations, thus enabling a reduction of about 20% in steam consumption when compared with that by conventional chillers. The control panel of this series comprises a sequencer including computer mother board and an LCD touch panel, both of which are used in EBARA's most advanced turbo-chiller. This made it possible to unify the graphic user interface (GUI) of the RFW Series absorption chiller and turbo chiller. A control program exclusively developed for the RFW Series is enabling improved functions, such as controllability and preventive maintenance, compared to those of conventional chillers.

Keywords
Absorption chiller, High efficiency, Steam consumption, Microcomputer control panel

by Kiyomi ARAKAWA, Terunobu SUYAMA, Akira ICHIHARA, & Toshihiro TANAKA
A demonstration of an advanced wastewater treatment plant is underway at the EXPO 2005 site as the final phase of NEDOOs (New Energy and industrial Technology Development Organization) Energy-saving Wastewater Treatment Technology Development Project. The processes at this plant include biological treatment consisting of ozonation for sludge reduction and phosphorus removal, advanced treatment by advanced oxidation, and advanced treatment by ozonation. The following article introduces the principles of biological treatment process, ozonation for sludge reduction and phosphorus removal, developed by the authors, as well as the verification-test plant.

Keywords
Sludge reduction, Ozone, Phosphorus recovery, Anaerobic-anoxic-oxidation process, Biological phosphorus removal, Biological nitrogen removal, Hydroxy apatite phosphate, BOD removal, Experimental facility, EXPO 2005 AICHI JAPAN

by Masaru KOJIMA, Yuji EGAWA, & Tetsuo UCHIDA
EBARA's large-scale, grid-connected, photovoltaic power generation system had been installed at Hyogo Arts & Culture Association, Hyogo Prefecture. Compared to conventional such systems for industrial use, which are typically 10-30 kW in capacity, this system features an amazing total capacity of 214 kW (160 kW from rooftop and 54 kW from wall mounted photovoltaic modules). The power generated from the modules is transformed into AC power by rooftop power conditioners. An incoming panel in the basement power reception room supplies power for firefighting and security within the facility. The system's the grid-connected design allows excess power generated by the system to be sold to the local electric company.

Keywords
Photovoltaic power generation, Photovoltaic (PV) module, Power conditioner, Solar irradiation, Array, Multi crystal (poly crystal), Grid-connected, Data collecting device, Solar simulator, Shadow cover rate

by Keisuke TSUKAMOTO, Shigeharu WATANABE, & Eiji ISHIKAWA
bara's biomass power plant, featuring an ICFB (Internal Circulation Fluidized-bed Boiler), is now operating in Nakoso Mill, Nippon Paper Industries Co., Ltd. The fuel used for the boiler is mainly wood waste produced at this plant. Construction began in April 2004 and completed within the set schedule in August 2004. This biomass power plant, highly reliable and capable of speedy compliance to load conditions, constitutes a single main boiler unit for supplying power for the entire mill as well as process steam. Prior to the introduction of this biomass power plant the power and steam used at this mill were supplied by a heavy fuel oil burning boiler and a diesel oil power generator. The annual heavy fuel oil consumption had been 34000 kl. The biomass power plant is not only achieving a 98% saving in fuel but also a significant reduction in carbon dioxide emission deriving from fossil fuel combustion (about 10 thousand tons per year).

Keywords
Fluidized-bed boiler, Power plant, Biomass, Thermal recycle, Carbon dioxide reduction, Wood waste, Coal, Steam turbine, Nippon Paper Industries Co., Ltd.

by Kazuhiro ESAKI
The ISO/IEC (International Organization for Standardization/International Electrotechnical Commision) JTC1/SC7 (Joint Technical Committee 1/Sub-Committee Seven) has since the early 80's been involved in the research and development for software quality evaluation as well as standardization, a field which until then had been virtually unknown versus computer hardware. The following outlines international standardization activities, including those that affect EBARA, introduces the newest trends in this field, and discusses the importance of standardization technology for software products.

Keywords
IT: Information technology, ISO: International Organization for Standardization, IEC: International Electrotechnical Commision, IS: International Standard, CD: Committee draft, SQuaRE: Software quality requirements and evaluation, Quality measure, Quality requirements specification, TR: Technical report, NP: New proposal

by Masako KODERA, Yukiko NISHIOKA, Hidekazu NAGANO, Tatsuo INOUE, & Katsuhiko TOKUSHIGE
A post-CMP (Chemical Mechanical Planarization) cleaning process for Cu/Low-k damascene devices has been developed which solves the problem of residues on Low-k films. Different cleaning solutions were used along with slurry to determine the optimal cleaning performance for Low-k (SiOC and spin-on MSQ), TEOS and Cu films. By this process, the line-to-line leakage Currents were found to be sufficiently low for the production of Cu/Low-k devices, suggesting a possibility that it could be used for cleaning Cu/Low-k LSI devices.

Keywords
CMP, Copper (Cu), Low-k, Cleaning, Hydrophobic, LSI, Leakage current, Defect, Water mark

by Xinming WANG, Daisuke TAKAGI, & Akira OWATARI
Selective depositing of thin cobalt alloy films as capping layers on Cu interconnects has already been proven to significantly and effectively improve EM performance, also as having a potential for reducing RC delay. A study had been made on the use of an electroless plating process for forming CoWP capping layers on wafer levels. Performance tests indicated satisfactory film thickness controllability, plating uniformity, barrier capability, surface morphology, deposition selectivity, as well as current leakage and resistance variation of interconnects. This process was thus proven as being feasible for use in wafer production.

Keywords
Electroless plating, Cobalt alloy, Metal cap, Semiconductor, Copper interconnect, Deposition, Process, Reliability

by Tohru SATAKE, & Nobuharu NOJI
EBARA is now developing a novel electron beam inspection system, named EBeye, which features high speed and high resolution inspection for detecting defective microchips. The machine is capable of faster inspection than conventional SEM systems, enabled by the projection electron microscope (PEM) technique. The following introduces and discusses this system.

Keywords
Defect, Inspection, Yield, Projection, Scanning electron microscope, Electron beam, Semiconductor, Process, Bright field, Dark field

by Masaaki OSATO
This report touches on transitions in the treatment of various hazardous gases deriving from semiconductor manufacturing processes, such as CVD and etching, as well as from LED manufacturing processes. Discussion on reduction and abatement methods is made. An introduction is also made on EBARA's development of optimal systems for the treatment of such gases, centering on PFCs and gases deriving from LED manufacturing.

Keywords
Per-fluoro compounds, Global warming effect gas, Fired thermal type, Electrical thermal type with catalyst, Chemical reaction type for PFCs, Electrical thermal type, Chemical reaction and physical adsorption type, Decomposed gases by high temperature, Treatment of NOx, Wet treatment of hydrogen fluoride

by Shinrou OHTA, Shunsuke NAKAI, & Hitoshi TSUJI
An optical endpoint detection monitoring system for oxide-CMP has been developed. Multi-wave-length halogen lamps are used as the light source and optical paths are formed by applying D.I. water to the measured point while the polishing is in progress. Data processing makes use of both clear optical paths and the advantages carried by multi-wave-lengths, thus attaining stable monitoring wave forms which feature low-noise and minimized pattern structure influences. The following introduces and discusses system components and gives examples of actual usage in STI and ILD processes.

Keywords
CMP, Endpoint detection, Oxide layer, Optical monitor, Multi-wave length, Water supply system, ILD-CMP, STI-CMP, Optical interference

by Masao HODAI, Tsutomu NAKADA, & Hiroyuki KANDA
A Cu interconnecting plating system has been developed which constitutes EBR cleaning and plating cells. The process flow of this system includes wafer loading, pre-treatment, Cu deposition, solution recovery, DIW rinse/dry and wafer unloading. This system enables advanced plating performance and superior wafer uniformity. This system features many other advanced features and can be considered as a precursor of post-90 nm wafer plating systems.

Keywords
Interconnect plating tool, Yield, Porous resistive element, Cathode, Anode, Plating solution, Overplate, Low acid, Bottom-up, Inert

by Fumio KURIYAMA, Yoshio MINAMI, & Masaaki KIMURA
The UFP-300A is a fully automatic bump-plating system released into the market in 2001. It features high quality bump plating and mass productivity. This system can also be used for rerouting, analog circuit boards and MEMS (Micro-Electro-Mechanical System). It is currently being used by leading-edge semiconductor manufacturers in the U.S.A. and Asia, as well as in Japan.

Keywords
Bump, Plating, Electroplating, Wafer process, LSI, Chip mounting, Flip chip, Packaging, High-density packaging, Wafer level CSP (Chip Size Packaging)

by Mitsuhiko SHIRAKASHI, Kenya ITO, Ichiro KATAKABE, & Masunobu ONOZAWA
A new wafer bevel polishing system has been developed and released into the market. This system features improved cleaning performance of the backside of wafers as well as the buffing off of damage on and the removal of residual matter on the bevel. Also featured is the use of a polishing tape for bevel polishing.

Keywords
Bevel, Notch, Polishing, Cleaning, SEMI, Polishing tape, Mini environment, Throughput

by Tetsuro SUGIURA, Keiji TANAKA, & Tomoyuki YAMAZAKI
A self-diagnosis system has been developed in an effort to prevent abrupt stoppage of dry vacuum pumps used in semiconductor manufacturing. This system monitors electrical current changes in a vacuum pump and features an algorithm by which a warning signal is output when a predetermined electric current value is exceeded in a vacuum pump. This setup helps prevent stoppage due to the accumulation of reactive by-products inside the pumps. A self-diagnosis adaptor, capable of diagnostic computation and data storage, was also developed for use in existing central monitoring systems.

Keywords
Dry vacuum pump, Self-diagnosis, Algorithm, Self-diagnosis adaptor, Peak current, Integral value, Central monitoring system, Lon-network, Pressure sensor, Warning set value

by Kenichi SUGIYAMA, Satoshi KAWAMURA, Hiroshi NAGASAKA, Katsuhiro MITSUHASHI, Toshiaki YASHIRO, & Tetsuya KONDO
Corrosion and wear resistant material for seawater handling, fluid machinery has been developed. This material is manufactured using an overlaying technique for enabling corrosion, erosion and abrasive wear resistance, and is superior in terms of cost-effectiveness, performance and repairability. Wear-resistant Co-based KV powder and crevice-corrosion-resistant Crevelloy constitute this material. Satisfactory hardness and corrosion resistance can be justified by the fact that the overlayer constitutes 15% mass VC, 35% mass Cr, 15% mass Mo and the rest Ni.

Keywords
Built up welding, Overlayer, Wear resistance, Corrosion resistance, Slurry erosion, Cavitation, Stellite, Colmonoy, Tribaloy, Crevelloy

by Yoshio MIYAKE, Yasutaka KONISHI, & Hiroshi UCHIDA
Two types of compact, brushless-DC canned motor pumps have been developed for use with various systems and equipment that are operated at flow rates of 3 L/min or less and under a total head of 10 m or below. Although there are many pumps in this class, namely positive displacement and turbo types, available in the market, there have been few that were compact and lightweight, and featuring high efficiency, long life, and low pulsation. Development of two pumps was carried out in parallel, that of a traditional centrifugal pump optimally configured to realize these concepts, and that of a gear pump for small flow rate application. These pumps are effective for use with compact systems and equipment which are operated long hours. Preparation is underway to release these pumps into the fuel cell, solar-energy-generation system, air conditioning and heat recovery system, and micro air-cooling system markets.

Keywords
Brushless-DC, Centrifugal pump, Gear pump, Permanent magnet rotor, Neodymium, Low pulsation, Friction loss, Canned motor, Impeller, Micro-pump

by Atsushi NAKAYAMA, & Keisuke NAKAMOTO
A tunnel ventilation monitoring and control system for Yasumiyama Tunnel is introduced. This tunnel is a combined tunnel for both pedestrians and vehicles, thus necessitating control over exhaust gas and noise of vehicles, on top of controlling the emission of such gas for environmental protection. The following outlines this system.

Keywords
Tunnel, Ventilation system, Remote monitoring, Control system, Emergency facilities

by Akira MASUI, & Masahiko KONNO
EBARA had undertaken the designing, construction and equipment installation of a wristwatch movement components manufacturing facility of Haimeka's Factory in Kagoshima Prefecture. This facility features minimal impact on the environment, energy saving, and excellent work efficiency. The facility's wastewater treatment system which evaporates drainage, surface-treatment process cooling system and electroplating are introduced and discussed.

Keywords
Drainage system, Displacement ventilation, Ion-exchange process, Ultra-slow velocity spurt hole

by Katsuyuki KURIHARA
EBARA has developed an industrial-waste incineration system capable of thermal power generation. Noteworthy is that this system can also incinerate paper-mill-deriving PS-wastes, considered difficult to recycle, and used tires, whose illegal dumping is causing a social problem. The incineration of these two types of wastes alone generates 14000 kW, making this system the largest scale such system in Japan. This system features superior boiler characteristics, in terms of thermal efficiency, controllability and operability, equal to those of fossil fuel burning boilers.This system also features minimized pollution and superior feasibility, and is thus being used now in conjunction with existing power generation plants as a base load unit. It can also perform as a backup power source when the main power plant in a factory is shut down for periodical inspection. This large-capacity system is expected to revolutionize power generation by waste incineration.

Keywords
Waste, Waste tire, Paper sludge, Power generation facility, Turbine, Boiler, Turbine bypass valve, Thermal efficiency, High temperature, Corrosion

by Shijie GUO, Yoshiyuki MARUTA, Hidenobu OKAMOTO, Hideki KANNO, & Kiyonori SATO
Significant pressure fluctuations were observed in suction water tunnels when an axial flow pump was operated without an actual head at some blade angles. To identify the causes, investigations were done by measuring acoustic natural frequencies and pressure fluctuations in the tunnels, lateral and torsional vibrations of the pump shaft, and pressure fluctuations of the oil in the hydraulic system to control the blade angle. Measurements were also taken by inserting air into the suction tunnels with a compressor and by setting air bags inside the tunnels. The results showed that acoustic resonance occurred in the tunnels, but it was not a simple resonance. The dominant frequency, which was neither the blade passing frequency nor its higher harmonics, depended on rotating speed in the reverse way: it decreased when rotating speed increased, and vice versa. The pressure fluctuations and vibrations of the pump shaft had a strong relationship. However, they had different dominant frequencies and occurred at different blade angles. Several measurements were made in different seasons and it was found that the phenomena were season-dependent. The causes are discussed. It is believed that the excitation source was vortex shedding from the blades, which locked into the acoustic resonance in the water tunnels via vibration of the blades.

Keywords
Flow-induced-vibration, Pressure fluctuation, Vortex shedding, Acoustic resonance, Turbomachinery, Axial-flow pump, Pump station, Rotordynamics, Hydraulic control, Angle-changable blade

by Hidenobu OKAMOTO, Shijie GUO, Hideki KANNO, Shuichiro HONDA, & Kiyonori SATO
This paper describes a vibration reduction countermeasure for a drainage pump station in which axial flow pumps were used. Investigations of vibration phenomena in the station showed that an unsteady fluid force occurred and the force locked into acoustic pressure fluctuations of the suction tunnel or vibration of the impeller. Reducing magnitude or changing frequency of fluctuations of fluid force are ways to remove lock-in phenomena. In the case of an axial type pump, one of the main causes of unsteady fluid force is unsteady vortex shedding on the impeller blade when the pump is operated under the off-design condition. Small lugs like tripping wires are mounted on the blade surface to reduce unsteady vortex shedding and to change its frequency. In this paper, we numerically examine the size and the position of a tripping wire on the blade surface using Vortex Method.

Keywords
Pressure fluctuation, Unsteady fluid force, Vortex shedding, Control of flow separation, Peak frequency, Vortex Method, Small lug, Lock-in, Resonance, Acoustic natural frequency

by Naoyuki INOUE, & Tomoyoshi IRIE
A study has been made on the cycles and control method of an absorption chiller-heater, a simultaneous cold and hot water supply type, used for air conditioning systems. Absorption cycles were studied by simulated cycles using an actual machine. Study results revealed that improving the control over the amount of circulated solution in an economizer cycle (cycle in which a condensed refrigerant for heating water shifts to the cooling cycle for chilling the water) had the greatest energy saving effect under all operational conditions.

Keywords
Absorption chiller-heater, Simultaneous supply, Absorption cycle, Economizer, Cycle simulation, Energy saving, Control characteristic

by Kazuaki SHIMAMURA, Hideyuki ISHIKAWA, & Toshihiro TANAKA
A highly efficient, phosphorus recovery method, featuring the use of a 2-tank type fluidized-bed, MAP (Magnesium, Ammonium, Phosphate) reactor was developed. Standardizing the MAP particle size in the reactor worked to enable high-efficiency recovery. A saving on chemical cost, for treating wastewater containing high concentrations of phosphorus, was achieved by the combined use of low-cost magnesium hydroxide and sulfuric acid. Performance tests were conducted using a pilot plant (treatment capacity:20 m3/day) and an anaerobic digestion supernatant. The phosphorus concentration in the treated water (10 - 25 mg/l) was found to be significantly reduced, compared to that in the supernatant (about 300 mg/l). A phosphorus recovery exceeding 90% was attained.

Keywords
Phosphorus recovery, Crystallization, Fluidized-bed, MAP (Magnesium ammonium phosphate), Anaerobic digestion supernatant, Seed crystal, Particle size

by Toshio HARA, Sinichi SHIGEHARA, Yoko KAKINUMA, & Isao ABE
BARA's newly developed Custom Pump Digital Catalogue system features a CD by which clients can obtain necessary data on a pump according to desired specifications. This system enables efficient engineering and sales transactions, front-end processing of documents including estimates, and a significant reduction in lead-time. The following outlines the development and details of this system and introduces current trends regarding such digital catalogues.

Keywords
Custom pump, Digital catalogue, BPR, Pump selection, E-market place, Catalogue contents, Pump pre-selection, Pump fine selection, HTML/XML, Selection logic flow, ISO13584

by Yuichi SATO, Toru TOKUMARU, & Takahiro SENDA
The RTC series, energy-saving centrifugal type refrigerator, includes a high-efficiency multi-stage compressor,developed for air-conditioning equipment. It features improved aerodynamic performance and minimized mechanical loss enabled by a ball bearing system. The cycle efficiency and system efficiency are also significantly improved compared to those of conventional such machines. In chilled water application, a COP (Coefficient Of Performance) of 6, an energy saving of about 25% compared to that of conventional such machines, while in ice-making application, a COP of 4.6, an energy saving of about 40% compared to the same. The following discusses development concepts, the energy-saving method, compressor features, as well as test results.

Keywords
Energy saving, Coefficient of performance (COP), Centrifugal type refrigerator, High efficiency, Multi-stage compressor, Economizer, Motor direct drive, Ball bearing, Low-pressure refrigerant

by Iku SATO, & Koji NOMURA
EBARA's Industrial Waste Incinerating Boiler Plant, incineration capacity of 19.8 tons/day, is now operating at the Amagi Plant of Bridgestone Corporation. This fluidized-bed type boiler system features the use of excess heat from the furnace to generate steam for tire production. Effluent non-combustibles and fly ash are used as material for steel and cement production.

Keywords
Industrial waste, Fludized-bed boiler, Reuse of energy, Reuse of resources