Ebara Engineering Review

by Koichi KIDO
A novel centralized monitoring system has been developed for dry vacuum pumps and waste gas abatement systems used in semiconductor manufacturing plants. This system, comprising a telecommunication adaptor, a data collection/storage personal computer and a server, can link up to 1200 monitoring units and collects data from all monitoring units every 1 second. The user can log in to the system via an internet browser from his personal computer, access real time situations, trends from collected data, and equipment chronological data, and also send warnings of irregularities by E-mail. All these functions can be operated remotely.

Keywords
Centralized monitoring system, Dry vacuum pump, Gas abatement system, Semiconductor manufacturing plant, Network, Intranet, Internet, E-mail

by Yousuke SHOUJI, Wataru ITOU, & Mitsutoshi HAGINO
Ebara's runoff rainwater pump (φ 1800 mm vertical volute, mixed-flow type) system has been installed 34 m below ground level at Osaka City's Nakahama Sewage Plant to cope with sudden rapid influx of rainwater. This pump is capable of high speed drainage, as well as a low speed standby operation. Its design includes resonance prevention worked out from vibration analysis results, including those on the motor and its reducer, considering the wide range of pump speed control. Noise prevention and reduction has been realized by use of a gas turbine power generator as the motor's power source. Another feature for minimizing the impact on the environment would be the spraying of pure water on the gas turbine engine combustor for inhibiting the generation of nitrogen oxides.

Keywords
Drainage pumping station, Vertical volute type mixed flow pump, Speed control, In-pipe heat exchanger, Gas turbine generator

by Sadayoshi TAKAHASHI & Pairoj SAENGTHONG
A cold-heat-source system, featuring a new type steam-absorption chiller, had been delivered to a large-scale plant located in the suburbs of Bangkok, Thailand. This was a follow-up of a delivery of 3 sets of model RAW ("Model RAW" in this Ebara Engineering Review is Ebara Refrigeration Equipment & System Co., Ltd.'s model code) 3516 kW steam-absorption chillers completed in November 2006. The new steam-absorption chiller (4571 kW) system, highly efficient and energy saving (high COP as an absorption type chiller: up to 1.38 for a single unit), sufficiently satisfied the client's plant modification requirements and specifications. An increase in the demand for this non-CFC using system, whose environmental impact is minimized as such, is looked forward to.

Keywords
High efficiency, Steam absorption chiller, Energy saving, Coefficient of Perormance, Evaporator, Cold heat loss, Reduction in construction cost, Chilledwater storage tank, Cooling load, Maintenance and modification

by Teruaki TSUKAMOTO, Kiyoyuki SAKURAI, Tetsuji IGUCHI, Takehiro OKA, Minoru SASAKI, & Junichi ICHIKAWA
Circumstances regarding the treatment of municipal solid waste have undergone drastic changes in the last 2 decades. The technology demanded in such treatment is also undergoing changes and includes factors such as efficient energy use, reduction in dioxin emission, reduction in final waste disposal amounts and slag melting techniques, as well as the reuse of waste as a resource. Corresponding measures and policies have also caused changes in the properties of waste to be treated and the public demand in waste treatment processes. Ebara Environmental Plant Co., Ltd. has made effective use of its abundant experience in the field and its exquisite technological expertise to develop the HPCC21 (High Pressure Combustion Control 21) type stoker, capable of versatile and safe municipal waste treatment. Its stable operation has been proven and it fulfills the diversified demands in present and future waste treatment. Concepts and the element technology encompassing the HPCC21 type stoker are introduced and discussed in the following.

Keywords
Municipal solid waste, Incinerator, Stoker, Fire grate, Auto combustion control, Gas treatment, Waste to energy, Forcible air-cooling

by Yasunari KURIHARA, & Ken ARIMA
The newly developed Ene-Move is an engineering tool for a heat source system. The Ene-Move's practical type heat source management simulation enables making estimations on environmental impact and running costs by reproducing field heat source management data on desktop. It includes a field data retrieval/collection wireless device, a heat source system estimate software program for automatic calculation of initial costs, and a software program for making optimal heat source system proposals. Comprehensive proposals for heat source systems which match particular situations can thus be worked out.

Keywords
Engineering, Simulation, Heat source, System, Running cost, Initial cost, Negative environmental impact, Operation, Wireless, Field dat

by Kazuhisa WATANABE, Sakae SHIMIZU, & Toshihiro SAKURAI
A new type vertical pump, featuring easy maintenance and inspection has been installed at the Uritagawa Pump Station. This pump's submerged bearing is made of a special resin which enables an anhydrous operation. An over-link gate (without gate posts) used for the discharge is enabling a reduction in cost and a better visual blend with the landscape. Of particular interest is that Ebara has been awarded the Kyushu Regional Development Bureau Chief Prize, Construction Category as Excellent Construction Company for its technological expertise featured in this pump and the short time it took to overall modify the pump station.

Keywords
New vertical pump, Submerged bearing, Maintenance-management, Special resin, Automatic screen, Without gate post, Over link gate

by Mitsuyoshi TAKAMI
Cases are increasing where the management of waste treatment plants is contracted to corporations in the private sector. Ebara has from 2008 taken over the management of Kashiwa City Hokubu Clean Center, one such waste treatment plant which had until then been managed by the municipality. The management contract is over a period of 14 years and the transfer of management work was done by step over a 3-year period. In 2008 this plant's incineration had already been in operation for 17 years, its car wash wastewater treatment facility for 28 years, and its bulky waste treatment facility for 31 years. Extensive modification had been carried out to update these facilities and measures are being taken to elongate their lives. Furthermore, improvement in the management itself is attempted by reducing power and utility consumption, as well as by implementing efficient human resource practices.

Keywords
Waste treatment plant, Long-term contracted full-responsibility management, Twin internally revolving floor fluidized bed incinerator, Extensive modification of waste treatment plant, Reduction in electric power consumption, Reduction in utility consumption, Use of human resources

by Motohiko NOHMI
Considerations on the erosive cavitation phenomenon, an overview on the recent progress in cavitation CFD, and trends in the development of erosion prediction methods are introduced in the following. Cavitation Erosion occurs due to impact loadings caused by the collapse of cavitation bubbles in the vicinity of an object. Although this phenomenon can be analyzed at a single bubble level, analysis is extremely difficult at a bubble cluster level. Cavitation CFD, which is using an approximating method called cavitation model, enables comprehensive analysis and is applied in estimating pump head breakdown. A number of proposals have been submitted for predicting probable erosion zones and obtaining quantitative erosion rate by estimating erosion intensity levels based on cavitation CFD results. Significant studies on a trial basis are underway but a decisive method has yet to be found, thus making further research necessary.

Keywords
Cavitation, CFD, Erosion, Bubble, Bubble Collapse, Impact Loadings, Micro Jet, Energy Cascade, Cavitation Model, Pit

by Yukihiro FUKUSUMI, Keisuke KAJIYAMA, & Motoki FUJIMURA
A new steam generation system, capable of generating 0.3 - 0.6 MPa(G) of steam from low-temperature waste hot water (80 - 90 degrees C) and other thermal sources, has been developed for providing as a heat source for various facilities in a factory. This enables good use of low-temperature hot wastewater which is normally discharged for being unsuitable as a heat source. By the new system an absorption heat pump, driven by low temperature hot water, generates low pressure steam of 0.1 - 0.2 MPa(G). A steam ejector is then used to pressurize the steam to 0.3 - 0.6 MPa(G). This system was co-developed with Tokyo Gas, Miura

Keywords
Waste heat, Waste hot water, Steam generating, Absorption heat pump, Absorption cycle, Steam ejector, Temperature boosting, Pressure boosting, Cogeneration system

by Keiichi ISHIKAWA
Recent demand in combustion type gas abatement systems include not only stable and high performance but also low running cost (energy saving) and improved operability. Ebara's G5 series achieves energy saving by an on-demand operation featuring a quick startup burner. Its automatic scraper system removes by-products produced after the abatement, thus improving operability. The system also uses water falls and a port for visual inspection of the system interior. It is capable of high level gas abatement, is compact and its maintenance can be done easily.

Keywords
Combustion type abatement system, Per fluoro compounds, Energy saving, On-demand operation, Low running cost, Quick startup, High operability, Transparent PVC material, Measure against by-products, Water wall

by Tsutomu MIENO
Ebara Environmental Plant Co., Ltd. has been contracted to manage a waste incineration facility which it had shipped to Saga Municipal Waste Incineration Plant. Under supervision by Saga City, an energy saving operation is underway making effective use of heat from waste incineration to generate electric power. A reduction in CO₂ emission is also being achieved. In the 3 years between 2007 and 2009, the reduction of CO₂ emission by the saving in power consumption reached about 1290 tons (equivalent value), thus contributing to not only to the reduction of global warming gas emission but also to cost saving.

Keywords
Municipal solid waste incineration plant, Operation technology, Energy saving, Reduction of Carbon dioxide emission

by Keisuke HAYABUSA, Hiroaki NAKAMOTO, Kazuaki INABA, & Kikuo KISHIMOTO
Simplified thermography-using methods are being developed for evaluating the fatigue limits of materials. By these methods, fatigue limits are determined as the load stress applying at the time of a surge in temperature, i.e. temperature changes due to stress amplitude increase on an objects under a cyclic load are measured. Although many such methods have been tested for evaluating tensional compression and bending loads on flat objects, there are almost no examples of actual cases where they had been used for evaluating the rotational bending of shafts. A thorough study had been made on the effectiveness of a thermography-using method for evaluating the rotational bending fatigue of a shaft, including the time dependency of temperature changes and the determination of an objective fatigue limit.

Keywords
Fatigue limit, Fatigue testing, Rotational bending, Thermography, Dissipated energy, Lock-in, Least squares method, S-N curve, Steady state, Inflection poin

by Mizuki NAGAI, Yusuke TAMARI, Shingo YASUDA, Masashi SHIMOYAMA, Nobutoshi SAITO, & Fumio KURIYAMA
A new electroplating technique has been developed for the EBARA UFP series, a highly productive and reliable wafer electroplating system series. This series, mainly applied for soldering and bumping, as well as for distribution lines, is in high demand by various Asian and domestic leading-edge semiconductor manufacturers. Ebara has gone a step further by developing a new electroplating technique which makes this series capable of copper filling of high aspect ratio TSV (Through-Silicon Via) for 3D packaging. The following introduces and discusses this new technique.

Keywords
Copper plating, Electroplating, 3D packaging, Through silicon via, Plating tool, Filling, Additives, Agitation, Flow rate

by Sadayoshi TAKAHASHI, Takanori NAKAMURA, & Shinya ISHIHARA
A chilled water feed system, operable under large temperature differences and equipped with our newly developed high-efficiency, inverter-driven, centrifugal refrigerating machine, has been delivered to a gold ore mine. This system was designed to handle a 20℃ temperature difference at system inlet (25℃) and outlet (5℃), and a refrigeration machine temperature difference of 12℃. This setup enables a refrigeration machine COP = 6.3 and system COP = 5.05. Under maximum load during the field test, a COP of 5.76 was attained. The chilled water temperature can also be controlled to minimize environmental impact in the mine. This system makes full use of the high-efficiency, inverter-driven, centrifugal refrigeration characteristics and is capable of reducing CO₂ emission during partial load and load fluctuation conditions.

Keywords
High-efficiency, Centrifugal refrigerating machine, Chilled water feed system operable under large temperature differences, Hishikari Mine, In-mine reduction of environmental inpact, Pump electric power reduction, Coefficient of performance, System efficiency, Partial load, CO₂ reduction