Demand for semiconductors is growing in all areas of industry, including smartphones, AI, and autonomous driving. Leveraging its extensive experience and technical capabilities, the Precision Machinery Company is offering optimal solutions to meet customer needs in the fields of CMP systems, which make up important processes in semiconductor manufacturing, dry vacuum pumps, and gas abatement technology.
We are engaged in the development of high-performance CMP systems with advanced flattening technology and energy-saving and resource-saving components that contribute to reducing environmental impact and automation of the production of dry vacuum pumps.
Flattening technology for CMP systems to support an affluent society
We produce CMP systems, which are essential for the manufacturing process of semiconductors for smart devices and home appliances that support our daily lives, and boast the second-largest share of the global market. They are widely used at semiconductor manufacturing facilities worldwide.
Dry vacuum pumps utilizing vacuum technology to create a clean environment
In the semiconductor manufacturing process, dry vacuum pumps used to create a clean vacuum are indispensable. Our dry vacuum pumps hold the second-largest global market share and are used by companies around the world.
Contributing to a sustainable society through exhaust abatement technology
Our exhaust abatement systems have a wide array of uses, such as reducing the high global warming effect of PFCs and safely treating flammable gases.
We produce CMP systems, which are essential for the manufacturing process of semiconductors for smart devices and home appliances that support our daily lives, and boast the second-largest share of the global market. They are widely used at semiconductor fabs worldwide.
Facing the challenges of miniaturization and high integration with flattening technologies
CMP systems, one system used in the manufacturing of semiconductors for which we have the second-largest global market share, achieve high integration density to improve the performance of semiconductor devices thanks to its high-precision flattening technology.
New plant to automate the production of dry vacuum pumps to meet global needs
We established a new automated plant for dry vacuum pumps in 2018 to develop a production framework to meet the needs of semiconductors around the world, promoting continuous improvement for further progress in automation.
Promoting earth-conscious, sustainable product development
To achieve carbon neutrality, the EBARA Group is striving to develop sustainable, environmentally-conscious semiconductor technologies through a variety of approaches.
We are engaged in the development of high-performance CMP systems with advanced flattening technology and energy-saving and resource-saving components that contribute to reducing environmental impact and automation of the production of dry vacuum pumps.
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Analysis
Leak detection
Radiation facility
Research and development
Plasma cleaning
Coating
EBARA’s products in semiconductor factory
CMP equipment
Dry vacuum pump model EV-M