The mainstay products of the Precision Machinery Company are dry vacuum pumps, gas abatement systems, and CMP systems. These products are used in semiconductor fabs in Japan and overseas.
Semiconductors are essential for AI, IoT, 5G, and other technologies that will shape the future of humanity. The environments inside these manufacturing fabs are completely different to the environment we live in. Dry vacuum pumps create a clean environment inside semiconductor manufacturing equipment by removing the gas in the equipment using the high-speed rotation control of a high-precision impeller called a rotor, and gas abatement systems convert the evacuated gas into environmentally clean gas. These products meet customer needs by providing the added value of space and energy-saving features with less GHG emissions in the semiconductor industry, one industry that is working on environmentally friendly initiatives. In addition, our CMP systems use advanced control technology to polish the wafer surface with high precision, achieving machining precision at the nanometer (nm) level. In the field of manufacturing technology, which continues to evolve in tandem with the increasing performance of semiconductors, we pursue a level of performance that goes beyond customer expectations, and in addition to our own research and development, we also conduct joint development with many universities and research institutes.
We embody and will further evolve the engineering spirit of EBARA, which is to always look ahead to the future with a market-in policy, make innovation happen, and never give up, even in the face of adversity.