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Dry Vacuum Pumps

What is a dry vacuum pump

Dry vacuum pumps are non-contact vacuum pumps that do not use oil or liquid for sealing. They achieve a clean vacuum without back-flow or diffusion of water and oil. Furthermore, there is no need for regular maintenance such as refilling or replacing water or oil, and it is a very easy pump to handle. It is an

indispensable pump for semiconductor manufacturing processes and FPD/LED/solar cell manufacturing processes where cleanliness is emphasized. Their applications have expanded in recent years because it allows easy, clean exhaustion of gas from analyzers such as mass spectrometers and electronic microscopes. Furthermore, they are being introduced in various applications such as vacuum drying processes and film deposition processes due to clean vacuum and convenient maintenance.

EBARA’s strengths in Dry Vacuum Pumps

1. Oil-free, clean vacuum
2. Can reach from atmospheric pressure to high vacuum
3. No need for regular maintenance such as refilling or replacing water or oil

EBARA’s strengths in Dry Vacuum Pumps

Energy-saving and compact design.
Reassuring global support and a rich product lineup

Ebara's dry vacuum pumps are characterized by their energy efficiency and small size, and are used in various fields. The unique optimized rotor design has improved compression efficiency and achieved low power consumption. Due to its compact and lightweight design, it can be installed in limited spaces and is easy to relocate. We have shipped more than 200,000 units* worldwide, and are active in various fields, mainly in the semiconductor industry, where requirements for performance and reliability are strict.

Furthermore, we have more than 50 service locations around the world and provide reliable global support. You can use the most suitable car from our extensive lineup, from compact and lightweight models with the highest standards in the industry, to hydrogen exhaust models, and high-load compatible models compatible with processes that generate reactive by-products.


*As of September 2020