Exhaust Abatement Systems

An Exhaust Abatement Systems, also known as a detoxification device or scrubber, is a treatment device that renders various gases used in manufacturing processes harmless and safely discharges them. It is used for purposes such as decomposing greenhouse gases, detoxifying toxic gases, safely disposing of flammable gases, and deodorizing odorous gases. In addition to safety measures for factory workers and the surrounding area, in recent years, demand has been increasing from the perspective of environmental protection and air pollution prevention.
Depending on the type and amount of gas emitted, treatment methods such as combustion, wet, dry, and catalytic types are used. In addition to semiconductor manufacturing and other electronic device industries, it is being increasingly used in a wide range of fields, including chemical plants, plating and painting processes, and the decomposition of refrigerants in air conditioners.

1. Detoxification of greenhouse gases (PFCs gases), greenhouse gases (GWG), harmful gases, flammable gases, and odorous gases.
2. Compact design allows for point-of-use use.

Our diverse product lineup includes combustion-type exhaust abatement systems that enable batch processing of perfluorocarbons (PFCs), global warming gases (GWGs), and flammable gases, as well as dry systems that need no effluent treatment, catalytic systems that require no fuel, and wet systems that use water treatment. In addition, because it is a point-of-use type that is used near the source, there is no need for long-distance piping to a large incinerator. It is possible to implement it with reduced initial costs. The compact design makes it easy to install and relocate, making it an easy-to-use Exhaust Abatement Systems for experimental purposes as well as mass production equipment.

In addition to combustion-type Exhaust Abatement Systems that can treat global warming gases (PFCs gases), greenhouse gases (GWG), and combustible gases all at once, we offer a diverse lineup of products, including dry types that do not require wastewater treatment, catalytic types that do not require fuel, and wet types that use water treatment.

Combustion-type Exhaust Abatement Systems reduce maintenance time and frequency through various product countermeasures such as our proprietary burners and product removal functions. Furthermore, it is equipped with an on-demand operation function that can change operating conditions such as fuel supply amount according to the type and amount of gas to be treated, making it possible to reduce running and maintenance costs.