Flexible configuration
Reduced installation burden
Space-saving
Batch operation and management possible
Connect 1-8 pumps
Integrated dry vacuum pump/exhaust abatement systems. We will propose a system that will maximize production efficiency for our customers. Incorporating dry vacuum pumps into an exhaust abatement system with the ideal configuration for the requirements will reduce the burden of equipment installation. Batch operation and management is possible as an integrated exhaust system, achieving highly efficient processes.
model EV-M
Dry vacuum pump with low power consumption, ideal for performance for high-load applications
model TND
Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.
model G5
Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs)