High throughput capability
Superior uniformity performance
Suitable for plating on diverse substrates and thin seed layers
Suitable for a variety of applications
Flexible platform configuration
Model UFP600AS is a clean room-compatible electroplating system that forms finely detailed patterns for bump, rewiring, via, etc. and other applications on semiconductor wafers and panels. The model UFP600AS uses our high-speed paddle system, which was cultivated with the semiconductor wafer system and abundant process experience, as a plating system for packaging panels. This achieves both high-speed plating and superior uniformity performance simultaneously. With flexible configurations that make it possible for a single unit to perform multiple processes, including bump, pillar, rewiring, through via hole, and fan-out, this model is being used for leading-edge panel-level packaging applications.
Further improvement of production efficiency, high-performance & flexible CMP system
Fixed abrasive for excellent polish/removal performance, edge control function.
High performance, high throughput for high productivity.