EBARA’s exhaust abatement systems can deliver safe treatment and detoxification of various types of gases, including PFC gases, flammable gases such as hydrogen gas, and gases containing toxic substances such as arsenic. The Point-of-Use Abatement (POU) systems, which are used close to the gas source, are easy to use both in mass-production factories and for experimental applications such as research institutes and university laboratories.
We will propose the most suitable system for your usage conditions. Contact us for details.