Ebara dry vacuum pumps are used in manufacturing processes of semiconductor and display as well as instruments of precise measurements and analysis. Plants of semiconductor and display require our pumps to function without fail 24 hours a day, 365 days a year. In addition, saving energy demands such as the power consumption reduction increase as well as pumping performance enhancement for the pump. Ebara works closely with clients to develop and deliver products that achieve efficiency and energy goals that match your needs.
Semiconductor manufacturing equipment, which require completely dust free environments, need to be installed in a clean room with high-performance air conditioning systems. A clean room can be costly to maintain according to size.
Therefore, it is important for our dry vacuum pumps to be small foot print. We have developed pumps with smaller instrumentation and improved layouts that reduce your footprint beyond expectations.
※ Pumping speed comparison of 7,000 ~ 10,000 L/min class
※ Power consumption line graph comparison of the model A70W class
※ 「Model ○○○ in this site our model code」