Ebara Engineering Review

by Yukihiro FUKUSUMI, Hiroyuki YAMADA, Tomoyoshi IRIE, & Naoyuki INOUE
Heat sources, such as hot water of 100°C or less and waste gas of 250°C or less emitted from plant processes, are often wasted because their temperature is too low to be utilized. We have developed a three-stage temperature boosting absorption heat pump and built a test apparatus based on it that boosts the waste heat temperature to generate 150°C steam. An operation test of the apparatus has been conducted to verify its effectiveness. Maintaining the shell pressure below the atmospheric pressure during operation ensures exemption from regulations for pressure vessels and significantly reduces the burden of periodic inspection. By generating steam from waste heat, the heat pump is expected to reduce the load on existing boilers and to decrease fossil fuel consumption in the boilers.

Keywords
Waste heat, Waste hot water, Steam generation, Absorption heat pump, Multi-stage, Temperature boosting, Co-generation system

by Masahiro HATAKEYAMA, Takeshi MURAKAMI, Kenji WATANABE, Tsutomu KARIMATA, & Kenji TERAO
An optical system based on projection electron microscopy (PEM) has been designed and fabricated to provide an EUV mask inspection system for half-pitch (hp) 16 nm devices. Compared to conventional DUV and SEM optics, the novel optical system based on PEM for EUV mask inspection can perform defect inspection at higher resolution and higher speed. To obtain a defect sensitivity of 16 nm, performance improvement requirements have been estimated with reference to a system for hp 2X nm devices (Ebara’s current system). After that, the novel optical system based on PEM has been designed and fabricated by establishing specifications that meet the requirements. Regarding aberration and transmittance requirements, this paper presents performance improvements achieved in the novel system.

Keywords
EUV mask, Defect inspection, Projection electron microscopy (PEM), Electron optical system, Imaging electron optics, Electron exposure optics, 1Xnm EUV mask, Aberration, Transmittance, Pixel size

by Kumpei KANDA & Kazuhiro ITO
The devastating Great East Japan Earthquake caused damage to many pump stations delivered by Ebara. Restoration activities began soon after the earthquake, and the emergency restoration of some pump stations was done very quickly; at these pump stations, drainage operation could be restarted before the onset of the rainy season in that year. The emergency restoration was followed by full-scale restoration construction, which incorporated several features to meet the requirements for renewing or retrofitting facilities for permanent use. Since the earthquake caused ground subsidence in the coastal area, the pump capacity was reviewed to compensate for the decrease in the drainage flow rate due to an increase in the required pump head. For portions not covered by the preliminary investigation, detailed inspection was performed to propose upgrades. The functions of the facilities were restored to the level before the earthquake through these processes.

Keywords
Earthquake, Tsunami, Restoration construction, Restoration activity, Drainage pump station, Pump station, Emergency restoration, Inspection, Ground subsidence, Upgrade

by Naoki YAMAZAKI, Shinya HIBINO, & Honglan ZHANG
The on-site test operation of two-stage dam pumps with a total capacity of 150 m3/s has been completed in Phase 1 of the eastern route of the South-North Water Transfer Project in China. The pumps with a large diameter of 3000 mm feature a unique large size submersible motor connected directly to the impeller via a shaft. Since their inner casing also serves as the motor outer casing, the impeller is mounted overhung on the motor shaft. With the 52-pole synchronous motor and frequency control, the pumps offer a wide operating range to cope with water level fluctuations. The development of large size tubular pumps connected directly to motors will allow the production of pumps that deliver cost-efficient and reliable pumping in the future.

Keywords
Large size submersible, Impeller, 52-pole, Synchronous motor, Frequency control, Tubular

by Kyoji HASHIMOTO, Takumi SHIBATA, Hiroshi SAITOH, & Tsutomu HAYANO
Improvement work has been implemented at Atsugi Environmental Center with government subsidies for “Establishing the Recycling-Based Society” instituted by Ministry of the Environment. The work has aimed both to reduce CO₂ emissions and to reduce increasing maintenance costs by renewing aging facilities after 24 years of elapsed operation period since completion of construction. Under the improvement work, many energy-saving devices has been installed to reduce the plant’s power consumption, also an electrical instrument and control system for excess steam utilization has been upgraded to increase power generation. By these works, CO₂ emissions coming from the plant operation has been significantly reduced and stable plant operation has been ensured. Additionally, the optimization of the incineration operation plan in the view of CO₂ reduction has became possible by installing a function to monitor and record CO2 <sub>emissions.

Keywords
Energy saving, Improvement work, Carbon dioxide, Reduction, Plant life extension, Atsugi, Turbine bypass, Steam condenser, Electric power, Power generation</sub>

by Kazumasa KAMACHI, Junichi AKIU, & Water and Sewer Department, City of Kurobe
A biomass plant in Kurobe City is operated by Kurobe E Service, a special purpose company (SPC), under a private finance initiative (Build-Transfer-Operate method). The plant provides methane fermentation of a pre-treated mixture of sewage sludge and food processing waste (coffee waste) to ensure good co-digestion with reduced VFA accumulation in the digested sludge. After dehydration of the digested sludge, steam from a biogas boiler is used to dry the sludge; thus, sludge drying is possible using little fossil fuel. A biomass resource recycling system has also been built through the utilization of the dried sludge.

Keywords
Anaerobic digestion, Methane fermentation, Co-digestion, Private finance initiative, Build-Transfer-Operate method, Sewage sludge, Food processing waste, Coffee waste, Full-scale plan

by Hiroaki NAKAMOTO, Motohiko NOHMI, Keisuke HAYABUSA, Shuji HATTORI, & Xiaohui YANG
Pumps used in critical applications, such as water treatment plants and power plants, are subject to regular maintenance for long-term operation. In recent years, comparatively minor damage is often repaired using plastic repair materials with high workability; a wide variety of plastic repair materials are commercially available for various applications. Plastic repair materials are evaluated in terms of their workability, water resistance, chemical resistance, cavitation erosion resistance, wear resistance, and delamination strength. However, complete data of these parameters are not provided in manufacturer catalogs, and cavitation erosion resistance has not been quantitatively clarified. We conducted cavitation erosion tests on plastic repair materials. This study reports the results of examination of glass fiber-reinforced plastics (GFRP) with excellent cavitation erosion resistance.

Keywords
Maintenance technology, Repair technology, Cavitation, Cavitation erosion, Glass fiber reinforced plastic, Plastic repair material, Cavitation erosion test, Cavitation erosion resistance

by Yoichi NAKAMURA, Hiroki KIRYU, & Masaki WATANABE
Model LPS-E, LPD-E, and FSD-E energy saving pumps using premium efficiency motors for improved pump efficiency have been developed. These pumps are included in the “Save Energy Pump” series, which comprises energy saving standard pumps with premium efficiency motors. A combination of high efficiency hydraulic design and premium efficiency motor technology provides higher overall efficiency than conventional products, contributing to energy savings. The pumps also feature rust protection and high safety, and are interchangeable with conventional models in terms of installation dimensions.

Keywords
Energy saving, Premium efficiency motor, Save Energy Pump, High efficiency, In-line pump, End-top pump, Standard pump, Hydraulic design, Cation electrodeposition coating, Safety measure

by Toyoji SHINOHARA, Makoto KASHIWAGI, Yasuteru AOKI, Toshiharu OCHIAI, & Kazumasa HOSOTANI
The combustion type gas abatement system Model G5-Dual has two waste gas abatement lines, allowing to maintain or to repair without interruption of waste gas abatement operations, and thus significantly reducing downtime. It also supports waste gas abatement at high gas flow rate by operating the two lines simultaneously. Accommodating up to 12 waste gas inlet ports, the system can adapt to up-to-date multi-chamber semiconductor manufacturing equipment.

Keywords
Combustion type gas abatement system, Semiconductor manufacturing equipment, Downtime, Backup system, Waste gas inlet port, Waste gas abatement line, Toxic gas, Inflammable gas, Perfluoro compounds

by Tetsuo TAKABE, Hiroyuki OSAWA, Sakae SHIMIZU, & Yoshio KUDO
The Shinkawa-kako Drainage Pump Station located in the Nishi-kanbara district, Niigata City, is one of the largest pump stations in Japan. The pump station is always exposed to seawater and subject to severe corrosion. With about 40 years having passed since the construction of the pump station, renewal of the facilities has been required. The renewal construction is extremely difficult because an ultra-large-scale tubular pump with concrete casing must be renewed during the limited period of the dry season each year, while maintaining the pumping capacity of the pump station. With Ebara’s know-how for renewal construction, however, the construction has proceeded smoothly. Various innovations and ideas have been adopted with focus on improving the on-site installation process for higher maintainability.
This first report summarizes the features of the pump station and the renewal construction design.

Keywords
Drainage pump station, Renewal construction, Horizontal adjustable vane axial flow tubular pump, Concrete casing, Impeller, Underground structure, Dry season, Seawater, Corrosion, Maintenance

by Fuminori ETO, Lingjia ZHAO, & Norihiko OWADA
An increase in the total capacity of the drainage pump station associated with its reconstruction may lead to formation of undesirable vortices in the pump sump. Thus, computational fluid dynamics (CFD) analysis has been conducted to examine countermeasures against such vortices. CFD analysis covering the balancing reservoir has found an optimal setup of vortex suppression devices, and its effectiveness has been determined through model testing. Since the setup of vortex suppression devices proposed in this study places a minimum burden on the existing underground structure and shortens the construction period, the study of vortices associated with the reconstruction has yielded breakthrough results. In the future, CFD analysis is expected to cover the entire portion of the study of vortices in the pump sump. This study provides a benchmark for advancement in the study of vortices.

Keywords
Reconstruction, Drainage pump station, Pump sump, Balancing reservair, CFD analysis, Vortex, Countermeasures against vortices, Model testing

by Sadayoshi TAKAHASHI, Hideaki FUEKI, Takamichi SONOBE, & Masashi KORETAKE
Ebara has delivered the first environmental wind tunnel to a Japanese company in India under an EPS (engineering, procurement, and supply) contract focusing mainly on facility design and equipment supply. The scope of delivery includes the general design of the aerodynamic wind tunnel/environmental installation (except for the building, measuring instruments, air conditioning facilities, and on-site construction) and the supply of equipment. A Göttingen type wind tunnel with high operational efficiency has been delivered; fillet type contraction nozzles have been used to ensure proper and adequate airflow around test objects. The fillet type contraction nozzles allow reducing the power consumption by 25% or more compared to our conventional Göttingen type wind tunnels. The main nozzle velocity has been increased by 4% or more by using performance data obtained from other recently delivered wind tunnels and incorporating design improvements. For the capacity of the wind tunnel delivered to India, the main nozzle (W2.9 m × H2.2 m) and the secondary nozzle (W2.05 m × H2.05 m) provide maximum nozzle outlet velocities of 136 km/h and 171 km/h, respectively.

Keywords
Wild tunnel, Aerodynamic wind tunnel, Environmental installation, Nozzle lifter, Settling chamber, Contraction nozzle, Göttingen type wind tunnel, Boundary layer control (BLC) system, Airflow distribution accuracy, Power consumption reduction

by Takeshi IZUMI, & Tatsuya DEGUCHI
Recent nuclear power plants require high purity water to protect nuclear reactors or steam generators from stress corrosion cracking (SCC). It is especially important to minimize sulfate ion leaching caused by oxidative degradation of cation exchange resins in condensate demineralizers during operation.
A uniform particle size (UPS) strong acid cation gel resin with 14% cross-linkage and excellent oxidization stability has recently been developed and applied to condensate purification systems.
For further improvement of water quality, some methods, such as the use of cation overlayers, have been examined to modify the resin bed configuration in condensate demineralizers. We have tested these methods by cold column testing.
We have also developed a new anion exchange resin capable of efficiently absorbing organic leachables from cation exchange resins and evaluated it by cold column testing.

Keywords
Ion exchange resin, Condensate demineralizers, Leachables, Total organic carbon, Cation overlayer, 4-layered bed

by Masakazu KOMAI, Kimi HATABAYASHI, & Kenta TSUKAKOSHI
A multifunctional variable speed driver (Model EVFC) has been developed that allows users to willingly and easily achieve energy savings in pump operations.
Model EVFC provides variable speed motor drive control for both induction motors and efficient permanent magnet synchronous motors. It also supports optimum pump control (including pressure and flow controls), multi-pump control, and many pump protection functions based on Ebara’s long-standing expertise.
Thus, model EVFC allows users to achieve energy savings in pump operations and to ensure suitable operation and protection for each application.

Keywords
Variable speed drive, Energy saving, Optimum pump control, Permanent magnet synchronous motor, Sensorless vector control, Motor mount, Multi-pump control, External communication function, Pump protection

by Masayoshi IKEDA, Hironori NINOMIYA, & Hiroyuki TAMURA
A controller for variable-speed pumping systems (Model EIPC) has been developed to allow the realization of variable-speed pumping systems meeting the needs of overseas markets and the local procurement of their components.
The controller supports up to six pump units and provides a flexible selection of pump drive systems. Thus, it allows the optimal configuration of pumping systems according to the specific requirements. EIPC can be used with various inverter products from major manufacturers, facilitating the local procurement of pumping system components in overseas markets. The controller detects low flow rates (pump stop flow) without using a flow switch and promotes maintenance-free system operation. It also ensures easy maintenance of pumping systems at overseas sites by communicating detailed pumping system operation data to a higher-level monitoring system or alerting device.

Keywords
Flow-switch-less, Multi-function display, Estimated constant end-pressure, Constant pressure, Direct connecting booster pump, Reception tank, Variable speed, Pump controller, Inverter, Maintenance-free

by Atsushi SHIOKAWA, & Hiroyasu KAWASHIMA
Many dry vacuum pumps are used in production lines for high-technology products in the semiconductor, liquid crystal, and photovoltaic industries. In addition, dry vacuum pumps have gradually replaced rotary vacuum pumps in a wide range of industrial fields, such as machinery parts manufacturing, metal working, food manufacturing, and laboratory equipment, for improving work environments, decreasing downtime, or reducing the frequency of maintenance.
The dry vacuum pump model EV-A10 features forced air cooling, constant pumping speed on the atmospheric side, and handling condensable gases, serving a wide variety of applications as described above.

Keywords
Vacuum pump, Dry vacuum pump, Rotary vacuum pump, Multi-stage roots pump, Air cooling, Pumping speed, Condensable gas, Semiconductor, Machinery parts manufacturing, Food manufacturing

by Takahiro OKAWA, Takayuki MORINAGA, Toshiyuki YASUNAGA, & Takehiko ANDOH
Swing Corporation has developed the “Ebagros U-700” series, a dehydration improver composed mainly of biodegradable cellulose with a short fiber length of 5 or 10 mm.
Recently, the diversification of lifestyles and the evolution of sludge treatment processes have made it difficult to achieve efficient dehydration by using only polymer.
By adding the “Ebagros U-700” series at 1 to 4% of the volume of solid sludge along with a polymer during sludge dehydration, (1) the water content of sludge cake can be reduced, thereby decreasing the amount of sludge to be transported off-site, and (2) improved operation efficiency, including increased sludge treatment throughput, can be obtained.
A long-term pilot test using digestion sewage sludge was conducted at the Miyabuchi sewage treatment plant in Matsumoto City. This paper presents the findings obtained from the pilot test as well as the test results at other plants.

Keywords
Ebagros, Dehydration, Short cut fiber, Sludge, Sludge cake, Biodegradable, Water content, Digestion sludge, Polymer, Dehydrator

by Katsuaki SATO, Kohji TAKAHASHI, & Takahiro OHKAWA
We have developed the “Ebadia LG-40” series, a high-performance and high-hardness spherical activated carbon derived from coconut shell, which has an enhanced proportion of mesopores and macropores (2 nm or more in size), by adding a special binder to pulverized coconut shell and carbonizing/activating the material after kneading/mixing, compression, and spheroidizing.
Through comparison tests, the “Ebadia LG-40” series has been demonstrated to be superior to typical crushed coal-based activated carbon or crushed coconut shell activated carbon in terms of organic matter treatment performance and activated carbon characteristics. This paper presents our findings regarding the applicability of the “Ebadia LG-40” series to advanced water purification, including reactivation and carbon dioxide emissions.

Keywords
Coconut shell spherical activated carbon, “Ebadia LG-40” series, Advanced water purification, Spheroidizing, Mesopore, Macropore, High hardness, Biological activated carbon, Reactivation, Carbon dioxide emissions

by Seiichiro YAMADA, & Masaaki IMAFUKU
This paper introduces the large submersible sewage pump model DSC4 for overseas markets. For this model, the 60 Hz series was originally developed for the North American market; the 50 Hz series was subsequently added. A new product has been added that features a large capacity and a wide output range. It is designed to meet functional and performance requirements in the global market, such as passage diameter, inverter control, dry pit installation, protective functions, and explosion-proof approval.

Keywords
Submersible sewage pump, Dry pit installation, Quick discharge connector, Cartridge type double mechanical seal, Internal cooling system, Leakage detector, Temperature detector for bearing, Explosion-proof approval

by Takayuki KURONUMA, & Dai SAKIHAMA
Focusing on “energy savings” and “environmental friendliness”, we have developed two types of PM canned motor pumps: Model SSPC and model SSPD. These models use permanent magnet synchronous motors and resin cans to reduce heat generation, which has been a major cause of elevated motor temperatures in conventional canned motors. They also feature compact size (1/2 to 1/3 of conventional products) and high efficiency (approximately 25% more energy-efficient than conventional products).

Keywords
Energy savings, Environmental friendliness, High efficiency, Permanent magnet motor, Canned motor, Induction motor, Eddy current, Revolving magnetic field, Harmonics, Magnetic attraction

by Hideji ISOBE
This product has been developed to achieve energy savings of water supply systems in buildings in Japan. Recent buildings have suffered from low water pressure at end points, such as water taps and hydrants; solutions for this problem that do not increase the entire water pressure of water supply systems have been in demand. To solve this problem, Ebara proposes the installation of a packaged booster pump unit near each end point to increase pressure by the amount required at the end point. For domestic-use water taps, required pressures depend on purposes and applications. A combination of a brushless DC motor and an inverter makes pump speeds variable, which enables this product to efficiently increase pressure to the target level. Introduction of this unit will eliminate energy loss in a building’s water supply and consequently enhance energy savings for the entire water supply system.

Keywords
Water supply system, Low water pressure, Optimal water supply, Optimal water pressure, Energy savings, Booster pump, Heat pump water heater, High pressure shower, Sealless, Brushless DC motor