Dry exhaust abatement system
Low power consumption
Highly efficient abatement of PFC gases
Solidification of fluorine series gases
No water scrubbing required
No fuel required
Model FDS is a dry exhaust abatement system that enables highly efficient and safe treatment of PFC gases with no need for water scrubbing. Capable of highly efficient treatment of at least 99.9% of PFC gases, and with the dry solidification of fluorine series gases after decomposition, no wastewater is generated and there is no need for treatment of toxic wastewater. Dual-cylinder types offer PFC removal efficiency of 99% or more at a maximum gas inflow rate of 250 L/min (in case of 250-L/min dual-cylinder type) and major improvements in system up time due to reactor vessel serial flow design, while a single-cylinder type enables easy replacement of existing dry exhaust abatement systems. Ideal for research laboratories that do not have wastewater treatment equipment or fuel lines.
| Model | Unit | FDS100S | FDS250 |
| Abatement method | Dry | Dry | |
| Reactors | 1 | 2 | |
| Reactor life detector | Standard: Load cell Option: PFC detector |
Standard: PFC detector | |
| Max. inflow gas volume | L/min | 100L/min | 250L/min |
| Dimensions | W x D x H mm | 600×600×2,000mm | 1,605×1,000×2,507 |
| Agent life | L/本 | CF4: 3,000 | CF4: 10,000 |
| Gases | CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. | CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. | |
model GT
Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing
model GCR
Highly efficient, energy-saving catalysis-type exhaust abatement system
model TND
Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.