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Semiconductor manufacturing equipment TOP Precision Machinery Company

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Sustainability TOP ESG Data Integrated Report

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Social Contribution Activities TOP

EBARA Hatakeyama Memorial Fund

Technologies

Ebara Engineering Review The EBARA Group’s Strategic Table of Technological Capabilities ”Monozukuri” at Ebara: Welcome to Ebara’s manufacturing world Technologies

Ebara Engineering Review The EBARA Group’s Strategic Table of Technological Capabilities ”Monozukuri” at Ebara Welcome to Ebara’s manufacturing world Technologies

Technologies TOP

Flow optimization Structural strength／vibration analyses Shaft／Bearing／Seal Nano-level polishing techniques that supports semiconductor EBARA pursues ultimate energy conservation with small footprint for dry vacuum pump Pump Systems Materials

Research and Development

Mechanical elements, vibration and acoustics technologies Material Engineering Numerical Analysis Technologies Surface analysis technology Ultra-high sensitivity evaluation technology Cavitation-related Technologies Additive Manufacturing Technology Application of VR Technologies in Industry Simulation Technology for Incineration Plants Corrosion Protection Technology

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Glossary
The "F" of Pumps Terms
Free air volume

Glossary

Free air volume

Volume of air at atmospheric pressure and atmospheric temperature.

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