model EV-S
Dry vacuum pump with low power consumption and small footprint
Low power consumption
Compact and light weight
Corrosion resistant material options
N2 purge model option available
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available
Features and Benefits
With EBARA’s unique rotor design and idling function, the Model EV-S range achieves world-class energy efficiency and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.
Specifications
| Model | Unit | EV-S20 | EV-S20P/N | EV-S30 | EV-S30P | EV-S50 | EV-S50P/N | EV-S100 | EV-S100P/N | EV-S200 | EV-S200P/N | |
| Pumping Speed | L/min | 1,670 | 1,670 | 3,300 | 3,300 | 5,000 | 5,000 | 10,000 | 10,000 | 20,000 | 20,000 | |
| Ultimate Pressure | Pa | 3 | 5 | 0.5 | 1.0 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | |
| Connection | Inlet | NW50 | NW50 | NW50 | NW50 | NW50 | NW50 | NW80 | NW80 | NW100 | NW100 | |
| Outlet | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 | NW40 | NW40 | ||
| Approx. Power at Ultimate Pressure | kW | 0.4 | 0.4 | 0.4 | 0.4 | 0.55 | 0.55 | 0.65 | 0.65 | 0.75 | 0.75 | |
| Cooling water | Flow rate | L/min | 1.5~3.0 | 1.5~3.0 | 1.5~3.0 | 1.5~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 |
| Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
| N2 | Flow rate | Pa•m3/s | - | 17～20 (2.4) | - | 17～20 (2.4) | 17～20 (2.4) | 17～20 (2.4) | 17～20 (2.4) | |||
| Power Supply Phase/Volt/Freq. | 200V Models | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | |
| 400V Models | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | - | - | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | ||
| Power capacity | kVA | 3.2 | 3.2 | 3.6 | 3.6 | 4.8 | 4.8 | 6.4 | 6.4 | 6.8 | 6.8 | |
| Weight | kg | 60 | 60 | 90 | 90 | 100 | 100 | 120 | 120 | 170 | 170 | |
| *Specifications are examples only. They may vary depending on the model, so please inquire for details. *Contact us for details. | ||||||||||||
